Dynamic scattering theory for dark-field electron holography of 3D strain fields.

Oral STRAIN DETERMINATION BY DARK-FIELD ELECTRON HOLOGRAPHY

Accurate determination of strain in electronic devices has been the subject of intense work during the last decades. Few techniques are able to provide highly localized and accurate information at the nanoscale. Among these, convergent-beam electron diffraction (CBED) combines the advantages of very small probes and remarkable sensitivity to small variations in the lattice parameter [1]. Howeve...

Investigating the Effects of Cut-Out Shield on High-Energy Electron Fields Using MAGIC Normoxic Polymer Gel

Introduction The use of cut-outs in electron applicators make changes on output, isodose, and percentage depth dose (PDD) curves. These changes and electron beam dose distribution in the form of three-dimensional (3D) can be measured by gel dosimeters. Materials and Methods Dosimetry was performed with and without a square shield (6×6 cm2 field). The energies were 4, 9, and 16 MeV and phantom w...

Quantitative strain mapping of InAs/InP quantum dots with 1nm spatial resolution using dark field electron holography

Darkfield electron holography for strain mapping at the nanoscale

We describe the application of the recent method of dark-field electron holography (DFEH) to the measurement of strain in nanostructures and devices. The holographic setup and experimental requirements will be briefly reviewed along with features of the software used to analysis the data. Examples will be given pertaining to strained-silicon transistors.

Dark-field electron holography for strain and composition measurement with a sub-nanometre spatial resolution

Transmission electron microscopy (TEM) is a well-established tool for strain measurement that combines an excellent precision with a high spatial resolution. Strain maps can be obtained by different TEM techniques such as high-resolution transmission electron microscopy (HRTEM), high-resolution scanning transmission electron microscopy (HR-STEM), convergent beam electron diffraction, nanobeam e...